TY  - BOOK
AU  - Landstrom, Scott, ed.
TI  - 12th Annual BACUS Symposium on Photomask Technology and Management
T2  - Proceedings of SPIE; V. 1809
SN  - 9780819410092 (Print)
PY  - 1993///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1809
ER  -