@book{22526,
	author = {Landstrom, Scott, ed.},
	title = {12th Annual BACUS Symposium on Photomask Technology and Management},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 1809},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1809}
}