00516nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006500117260003200182300002000214490003300234856010300267IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819407337 (Print)  cIIA Library  aMcGinnis, Kevin, ed. 0a11th Annual BACUS Symposium on Photomask Technologyh[eBook]  aWashington, USAbSPIEc1992  aOnline resource  aProceedings of SPIE; V. 1604  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1604yClick Here to Access eBook