@book{22518,
	author = {McGinnis, Kevin, ed.},
	title = {11th Annual BACUS Symposium on Photomask Technology},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1604},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1604}
}