00496nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002000092245005000112260003200162300002000194490003300214856010300247IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819406057 (Print)  cIIA Library  aWiley, Jim, ed. 0a10th Annual Symp on Microlithographyh[eBook]  aWashington, USAbSPIEc1991  aOnline resource  aProceedings of SPIE; V. 1496  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1496yClick Here to Access eBook