@book{22513,
	author = {Wiley, Jim, ed.},
	title = {10th Annual Symp on Microlithography},
	publisher = {SPIE},
	year = {1991},
	series = {Proceedings of SPIE; V. 1496},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1496}
}