00448nam a2200133Ia 4500003000900000008004100009020002700050040001600077100002500093245007800118260003200196300002000228856006600248IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510628137 (Online)  cIIA Library  aKeskinbora, Kahraman 0aPrototyping Micro-/Nano-Optics with Focused Ion Beam Lithographyh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  uhttps://doi.org/10.1117/3.2531118yClick Here to Access eBook