@book{22432,
	author = {Keskinbora, Kahraman},
	title = {Prototyping Micro-/Nano-Optics with Focused Ion Beam Lithography},
	publisher = {SPIE},
	year = {2019},
	address = {Washington, USA},
	url = {https://doi.org/10.1117/3.2531118}
}