00449nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100001700119245004900136260003200185300002000217856006600237IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510617377 (Print)  a9781510617384 (Online)  cIIA Library  aYen, Anthony 0aOptical Physics for Nanolithographyh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  uhttps://doi.org/10.1117/3.2314953yClick Here to Access eBook