00446nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100001700119245004700136260003200183300002000215856006500235IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819475602 (Print)  a9780819481825 (Online)  cIIA Library  aLin, Burn J. 0aOptical Lithography: Here Is Why h[eBook]  aWashington, USAbSPIEc2010  aOnline resource  uhttps://doi.org/10.1117/3.821000yClick Here to Access eBook