TY  - BOOK
AU  - Okoroanyanwu, Uzodinma
TI  - Molecular Theory of Lithography
SN  - 9781628415513 (Print)
PY  - 2015///
CY  - Washington, USA
PB  - SPIE
UR  - https://doi.org/10.1117/3.2179925
ER  -