00455nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100002700119245004500146260003200191300002000223856006600243IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781628415513 (Print)  a9781628415520 (Online)  cIIA Library  aOkoroanyanwu, Uzodinma 0aMolecular Theory of Lithographyh[eBook]  aWashington, USAbSPIEc2015  aOnline resource  uhttps://doi.org/10.1117/3.2179925yClick Here to Access eBook