TY  - BOOK
AU  - Motamedi, Manouchehr
TI  - MOEMS: Micro-Opto-Electro-Mechanical Systems
SN  - 9780819450210 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://doi.org/10.1117/3.2265061
ER  -