TY  - BOOK
AU  - Rai-Choudhury, Prosenjit
TI  - MEMS and MOEMS Technology and Applications
SN  - 9780819495983 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://doi.org/10.1117/3.2265068
ER  -