00468nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245005600148260003200204300002000236856006600256IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819495983 (Print)  a9781510607941 (Online)  cIIA Library  aRai-Choudhury, Prosenjit 0aMEMS and MOEMS Technology and Applicationsh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  uhttps://doi.org/10.1117/3.2265068yClick Here to Access eBook