00446nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100002300119245004100142260003200183300002000215856006500235IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819430526 (Print)  a9780819478559 (Online)  cIIA Library  aLevinson, Harry J. 0aLithography Process Controlh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  uhttps://doi.org/10.1117/3.322162yClick Here to Access eBook