TY  - BOOK
AU  - Rai-Choudhury, Prosenjit
TI  - Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
SN  - 9780819497864 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://doi.org/10.1117/3.2265070
ER  -