00520nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245010800148260003200256300002000288856006600308IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819497864 (Print)  a9781510607965 (Online)  cIIA Library  aRai-Choudhury, Prosenjit 0aHandbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithographyh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  uhttps://doi.org/10.1117/3.2265070yClick Here to Access eBook