Rai-Choudhury, Prosenjit <br/><br/>
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography  [eBook] 

 - Washington, USA  SPIE  1997 
 - Online resource 
<br/><br/><label>ISBN: </label>9780819497864 (Print) 9781510607965 (Online)