@book{22265,
	author = {Rai-Choudhury, Prosenjit},
	title = {Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography},
	publisher = {SPIE},
	year = {1997},
	address = {Washington, USA},
	url = {https://doi.org/10.1117/3.2265070}
}