00723nam a2200181Ia 4500003000900000008004100009020002600050020002700076040001600103100003600119245012700155260003200282300002000314856006600334942000700400999001700407952011700424IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819423795 (Print)  a9781510607972 (Online)  cIIA Library  aRai-Choudhury, Prosenjit940957 0aHandbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabricationh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  uhttps://doi.org/10.1117/3.2265071yClick Here to Access eBook  cEB  c22264d22264  00104070aBANbBANd2011-07-01eSPIEl0pEB1724r2021-11-05uhttps://doi.org/10.1117/3.2265071w2021-11-05yEB