00539nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100002900119245012700148260003200275300002000307856006600327IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819423795 (Print)  a9781510607972 (Online)  cIIA Library  aRai-Choudhury, Prosenjit 0aHandbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabricationh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  uhttps://doi.org/10.1117/3.2265071yClick Here to Access eBook