Rai-Choudhury, Prosenjit <br/><br/>
Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication  [eBook] 

 - Washington, USA  SPIE  1997 
 - Online resource 
<br/><br/><label>ISBN: </label>9780819423795 (Print) 9781510607972 (Online)