@book{22264,
	author = {Rai-Choudhury, Prosenjit},
	title = {Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication},
	publisher = {SPIE},
	year = {1997},
	address = {Washington, USA},
	url = {https://doi.org/10.1117/3.2265071}
}