00448nam a2200133Ia 4500003000900000008004100009020002700050040001600077100002200093245008100115260003200196300002000228856006600248IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510637252 (Online)  cIIA Library  avan Duijn, Jorijn 0aFortunes of High-Tech: a History of Innovation at ASM Internationalh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  uhttps://doi.org/10.1117/3.2572061yClick Here to Access eBook