00472nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100002300119245006600142260003200208300002000240856006600260IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819497994 (Print)  a9780819498007 (Online)  cIIA Library  aEllis, Jonathan D. 0aField Guide to Displacement Measuring Interferometryh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  uhttps://doi.org/10.1117/3.1002328yClick Here to Access eBook