00446nam a2200145Ia 4500003000900000008004100009020002600050020002700076040001600103100001800119245004500137260003200182300002000214856006600234IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510616783 (Print)  a9781510616790 (Online)  cIIA Library  aBakshi, Vivek 0aEUV Lithography, Second Editionh[eBook]  aWashington, USAbSPIEc2018  aOnline resource  uhttps://doi.org/10.1117/3.2305675yClick Here to Access eBook