TY  - BOOK
AU  - Dammel, Ralph R.
TI  - Diazonaphthoquinone-based Resists
SN  - 9780819410191 (Print)
PY  - 1993///
CY  - Washington, USA
PB  - SPIE
UR  - https://doi.org/10.1117/3.2265072
ER  -