00841nam a2200217Ia 4500003000900000008004100009020002200050040001600072080001900088100002700107245009800134260007200232300001500304650005600319650002600375700003000401700003100431942000700462999001700469952013700486IN-BaIIA211028s9999    xx            000 0 eng d  a978-0-819-44609-1  cIIA Library  a535.317.2bDOY  aDoyle, Keith B.933444 0aIntegrated optomechanical analysiscKeith B. Doyle, Victor L. Genberg and Gregory J. Michels.  aWashingtonbThe International Society for Optical Engineeringc2002  axiv, 231p.  aOptical instruments-Design and constructions933445  aOptical systems93247  aGenberg, Victor L.933446  aMichels, Gregory J.933447  cBK  c17657d17657  00104070aBANbBANcGENd2010-03-15eANJ   g1997.10l0o535.317.2/ DOYp18579r2021-11-05v1997.10w2010-03-15yBKGRs. 1997.10