<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>MEMS adaptive optics</title>
    <subTitle>proceedings of SPIE conference held in San Jose, California, USA, 24 - 25 January 2007</subTitle>
  </titleInfo>
  <name type="conference">
    <namePart>Society of Photo-Optical Instrumentation Engineers Conference USA 2007 Jan. 24 - 25</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Bifano, Thomas G.</namePart>
  </name>
  <name type="personal">
    <namePart>Kubby, Joel A.</namePart>
  </name>
  <name type="personal">
    <namePart>Olivier,  Scot S., ed.</namePart>
  </name>
  <name type="corporate">
    <namePart>Society of Photo-optical Instrumentation Engineers</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">xx</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Washington</placeTerm>
    </place>
    <publisher>The International Society for Optical Engineering</publisher>
    <dateIssued>2007</dateIssued>
    <dateIssued encoding="marc">9999</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>[various pagings.]</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by Scot S. Olivier,Thomas G. Bifano and Joel A. Kubby </note>
  <subject>
    <topic>Optics, Adaptive-Congress, Microelectromechanical systems, Optical instruments-Design and constuction MEMs</topic>
  </subject>
  <classification authority="udc">535.8(063) MEM</classification>
  <identifier type="isbn">9780819465801</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg"/>
    <recordCreationDate encoding="marc">211028</recordCreationDate>
  </recordInfo>
</mods>
