00938nam a2200205Ia 4500003000900000008004100009020001800050040001600068080002000084111009000104245017600194260007200370300002300442490003300465650011100498700002200609700001900631700002700650710005500677IN-BaIIA211028s9999    xx            000 0 eng d  a9780819465801  cIIA Library  a535.8(063)bMEM  aSociety of Photo-Optical Instrumentation Engineers ConferencecUSAd2007 Jan. 24 - 25 0aMEMS adaptive opticsbproceedings of SPIE conference held in San Jose, California, USA, 24 - 25 January 2007cedited by Scot S. Olivier,Thomas G. Bifano and Joel A. Kubby   aWashingtonbThe International Society for Optical Engineeringc2007  a[various pagings.]  aProceedings of SPIE; v. 6467  aOptics, Adaptive-Congress, Microelectromechanical systems, Optical instruments-Design and constuction MEMs  aBifano, Thomas G.  aKubby, Joel A.  aOlivier,  Scot S., ed.  aSociety of Photo-optical Instrumentation Engineers