@book{16534,
	author = {Society of Photo-Optical Instrumentation Engineers Conference and Bifano, Thomas G. and Society of Photo-optical Instrumentation Engineers},
	title = {MEMS adaptive optics},
	publisher = {The International Society for Optical Engineering},
	year = {2007},
	series = {Proceedings of SPIE; v. 6467},
	address = {Washington}
}