00818nam a2200205Ia 4500003000900000008004100009020001800050040001600068080001700084245017300101260003700274300001400311490006500325650001600390650001900406700002800425942000700453999001700460952013500477IN-BaIIA211028s9999    xx            000 0 eng d  a1-4020-1968-8  cIIA Library  a681.586bMIC 0aMicromechanics and nanoscale effectsbMEMS, multi-scale materials and micro-flowscedited by V. M. Harik and Li-Shi Luo                                                   aDordrechtbKluwer Academicc2004  axv, 240p.  aICASE/LaRC interdisciplinary series in science and engineeri  aMEMs929122  aSensors926502  aLuo, Li-Shi, ed.929123  cBK  c15805d15805  00104070aBANbBANcGENd2004-12-30eANJ   g5949.90l0o681.586/ MICp16727r2021-11-05v5949.90w2004-12-30yBKGRs. 5949.90