TY  - BOOK
AU  - Luo, Li-Shi, ed.
TI  - Micromechanics and nanoscale effects: MEMS, multi-scale materials and micro-flows
T2  - ICASE/LaRC interdisciplinary series in science and engineeri
SN  - 1-4020-1968-8
PY  - 2004///
CY  - Dordrecht
PB  - Kluwer Academic
KW  - MEMs
KW  - Sensors
ER  -