00602nam a2200169Ia 4500003000900000008004100009020001800050040001600068080001700084245017300101260003700274300001400311490006500325650000900390650001200399700002100411IN-BaIIA211028s9999    xx            000 0 eng d  a1-4020-1968-8  cIIA Library  a681.586bMIC 0aMicromechanics and nanoscale effectsbMEMS, multi-scale materials and micro-flowscedited by V. M. Harik and Li-Shi Luo                                                   aDordrechtbKluwer Academicc2004  axv, 240p.  aICASE/LaRC interdisciplinary series in science and engineeri  aMEMs  aSensors  aLuo, Li-Shi, ed.