TY - BOOK AU - O'Hanlon, J. F TI - A user's guide to vaccum technology T2 - Xerox copy SN - 0-471-81242-0 PY - 1989/// CY - New York PB - John Wiley & Sons KW - Cryogenic pumps KW - Gas properties KW - Vaccum pumps KW - Vaccum technology ER -