TY  - BOOK
AU  - Delchar, T. A
TI  - Vacuum physics and techniques
T2  - Physics and its applications; v. 6
SN  - 0-412-46590-6
PY  - 1993///
CY  - London
PB  - Chapman and Hall
KW  - Kinetic theory
KW  - Techniques
KW  - Vaccum systems
KW  - Vacuum pumps
ER  -