00520nam a2200193Ia 4500003000900000008004100009020001800050040001600068080001700084100001800101245004900119260003500168300001400203490003900217650001900256650001500275650001900290650001700309IN-BaIIA211028s9999    xx            000 0 eng d  a0-412-46590-6  cIIA Library  a533.5bDEL-6  aDelchar, T. A 0aVacuum physics and techniquescT. A. Delchar  aLondonbChapman and Hallc1993  aix, 253p.  aPhysics and its applications; v. 6  aKinetic theory  aTechniques  aVaccum systems  aVacuum pumps