TY  - BOOK
AU  - Valiev, Kamil A
TI  - The physics of submicron lithography
T2  - Microdevices: physics and fabrication technologies
SN  - 0-306-43578-0
PY  - 1992///
CY  - New York
PB  - Plenum Press
KW  - Electronics
KW  - Lithography
KW  - Physics
ER  -