00551nam a2200181Ia 4500003000900000008004100009020001800050040001600068080001600084100002000100245010300120260003300223300001400256490005500270650001600325650001600341650001200357IN-BaIIA211028s9999    xx            000 0 eng d  a0-306-43578-0  cIIA Library  a621.38bVAL  aValiev, Kamil A 4aThe physics of submicron lithographycKamil A. Valiev                                               aNew YorkbPlenum Pressc1992  axi, 493p.  aMicrodevices: physics and fabrication technologies  aElectronics  aLithography  aPhysics