Valiev, Kamil A <br/><br/>
The physics of submicron lithography 
Kamil A. Valiev                                              
 - New York  Plenum Press  1992 
 - xi, 493p. 
 - Microdevices: physics and fabrication technologies .
<br/><br/><label>ISBN: </label>0-306-43578-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics<br/>Lithography<br/>Physics
<br/><br/><label>Universal Decimal Class. No.: </label>621.38  / VAL