00470nam a2200157Ia 4500003000900000008004100009020001800050040001600068080001600084100002200100245010200122250001200224260003800236300001600274650002200290IN-BaIIA211028s9999    xx            000 0 eng d  a0-471-81242-0  cIIA Library  a533.5bO'HA  aO'Hanlon, John F. 2aA user's guide to vacuum technologycJohn F. O'Hanlon                                              a2nd ed.  aNew YorkbJohn Wiley & Sonsc1989  axvii, 481p.  aVacuum technology