00679nam a2200193Ia 4500003000900000008004100009040001600050080001500066100001900081245014600100260003100246300001500277650002500292650002900317700002300346942000700369999001700376952009200393IN-BaIIA211028s9999 xx 000 0 eng d cIIA Library a533.5bWAR aWard, L920479 0aIntroduction to the theory and practice of high vacuum technologycL. Ward and J. P Bunn  aLondonbButterworthsc1967 avii, 216p. aVacuum physics92238 aVacuum technology920480 aBunn, J. P.920481 cBK c11800d11800 00104070aBANbBANcGENd1996-07-09l0o533.5/ WARp12715r2021-11-05w1996-07-09yBK