Developments in Semiconductor Microlithography IV (Record no. 24633)
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000 -LEADER | |
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fixed length control field | 00564nam a2200169Ia 4500 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | IN-BaIIA |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 211028s9999 xx s 000 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9780892522026 (Print) |
040 ## - CATALOGING SOURCE | |
Transcribing agency | IIA Library |
100 ## - MAIN ENTRY--PERSONAL NAME | |
Personal name | Dey, James, ed. |
9 (RLIN) | 42881 |
245 #0 - TITLE STATEMENT | |
Title | Developments in Semiconductor Microlithography IV |
Medium | [eBook] |
260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
Place of publication, distribution, etc. | Washington, USA |
Name of publisher, distributor, etc. | SPIE |
Date of publication, distribution, etc. | 1979 |
300 ## - PHYSICAL DESCRIPTION | |
Extent | Online resource |
490 ## - SERIES STATEMENT | |
Series statement | Proceedings of SPIE; V. 0174 |
856 ## - ELECTRONIC LOCATION AND ACCESS | |
Uniform Resource Identifier | <a href="https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0174">https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0174</a> |
Link text | Click Here to Access eBook |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | eBooks |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Source of acquisition | Serial Enumeration / chronology | Total Checkouts | Barcode | Date last seen | Uniform Resource Identifier | Price effective from | Koha item type |
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IIA Library-Bangalore | IIA Library-Bangalore | 01/07/2011 | SPIE | V. 174 | EB4093 | 05/11/2021 | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0174 | 05/11/2021 | eBooks |